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- Ultra‑Compact Design Readhead thickness is only 9.6 mm, 39% thinner than competing models, allowing installation in tight machine housings.
- Fully Programmable Performance Interpolation, output bandwidth, filter cutoff and limit signal polarity are all software configurable via MicroE SmartPrecision II, stored in non‑volatile memory.
- Universal Grating Compatibility One readhead works with metal strip, glass linear, and rotary glass gratings, simplifying inventory and system design.
- Robust EMI Shielding CE‑approved design with double‑shielded cable ensures reliable signal transmission even in noisy industrial environments.
- Long‑Travel Capability Field‑cuttable 0.3 mm metal strip enables up to 30 m measurement range for large gantry or linear module applications.
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Application and configuration notes
Product Overview
The MicroE MII5830‑AB‑16384 is a flagship integrated digital incremental grating measurement system from Novanta’s MicroE Systems. Designed for micro‑positioning platforms, semiconductor devices, and medical automation, it combines a 38.5 × 13.5 × 9.6 mm readhead with fully programmable software, delivering nanometer‑level resolution and robust EMI immunity (CE compliant).
Key Hardware & Dimensional Advantages
- Readhead size: 38.5 × 13.5 × 9.6 mm – 39% thinner than competing units.
- Unified 6 mm wide grating rail with zero‑position and dual limit tracks, saving half the space of traditional optics.
- Metal strip thickness: 0.3 mm, field‑cuttable up to 30 m travel; glass grating up to 995 mm.
- Alignment tolerance: ±0.15 mm gap, X‑axis ±1°, Y/Z axes ±2°; automatic calibration under 30 s.
- Double‑shielded high‑flex cable, 10 m long, 4.2 mm outer diameter, 20 mm bend radius with 20 million flex cycles.
Programmable Core Functions
All parameters are configured via MicroE SmartPrecision II software and stored in non‑volatile memory, ensuring settings are retained after power loss. Features include:
- Interpolation factor: integer X4‑X16384, linear resolution 5 µm – 1.22 nm.
- Output bandwidth: 0.098 M‑50 M orthogonal counts / s.
- Adjustable low‑pass filter: 0.01 kHz‑100 kHz.
- Programmable limit‑signal polarity and dual‑mode safety logic.
- Automatic signal‑gain optimization to compensate for mis‑alignment or contamination.
- Three‑state differential alarm output for fault diagnostics.
- High‑speed serial debug port for firmware updates and status read‑back.
Technical Performance
| Parameter | Value |
|---|---|
| Base grating pitch | 20 µm |
| Max linear speed | 5 m/s |
| Max rotary speed | 6000 rpm |
| Metal strip accuracy | ±5 µm/m |
| Glass linear accuracy | ±1 µm (≤130 mm) / ±1.5‑5 µm (130 mm‑1 m) |
| Rotary grating accuracy | ±2.1 arc‑sec |
Typical Applications
Ideal for high‑precision CNC machine tools, semiconductor wafer bonders, micro‑surgical robots, optical spectrometers, interferometers, micro‑assembly stations, and precision feed axes.
Contact & Inquiry
For quotations, technical support, and shipping to overseas locations, please contact the authorized distributor Beijing Gaokong Technology (Contact: Dong Yu, +86 185 1855 6588).
Key Selling Points
- Ultra‑Compact Design: Readhead thickness is only 9.6 mm, 39% thinner than competing models, allowing installation in tight machine housings.
- Fully Programmable Performance: Interpolation, output bandwidth, filter cutoff and limit signal polarity are all software configurable via MicroE SmartPrecision II, stored in non‑volatile memory.
- Universal Grating Compatibility: One readhead works with metal strip, glass linear, and rotary glass gratings, simplifying inventory and system design.
- Robust EMI Shielding: CE‑approved design with double‑shielded cable ensures reliable signal transmission even in noisy industrial environments.
- Long‑Travel Capability: Field‑cuttable 0.3 mm metal strip enables up to 30 m measurement range for large gantry or linear module applications.
Buying Guide and Applications
Selection Guide for High‑Precision Grating Scales
When choosing a grating scale for CNC or metrology applications, consider travel length, resolution, and environmental robustness. The MII5830‑AB‑16384 offers a compact 9.6 mm profile, up to 30 m metal strip travel, and programmable interpolation up to 1.22 nm. Its CE‑approved EMI shielding makes it suitable for electrically noisy workshops. Pair it with the MicroE SmartPrecision II software for seamless integration with motion controllers.
Integration Tips for Semiconductor Equipment
Semiconductor tools require sub‑micron repeatability. The built‑in signal‑gain algorithm of the MII5830 automatically compensates for dust or minor grating contamination, reducing cycle error. Install the 6 mm wide strip close to the machine frame to minimize cantilever effect, and use the double‑shielded cable to keep signal integrity over long runs. Calibration can be completed in less than a minute, allowing fast change‑over between wafer sizes.
Maintenance and Reliability
Because the MII5830 is a solid‑state, non‑contact device, there is no mechanical wear on the readhead. Regular visual inspection of the grating surface for heavy contamination is sufficient. The system is pre‑calibrated with a NIST‑traceable laser interferometer, ensuring measurement confidence over the expected five‑year service life. Firmware updates are applied via the serial debug port without disassembly.
Why Choose an Authorized MicroE Distributor?
Authorized distributors provide genuine parts, official firmware, and warranty support directly from Novanta. They also have access to the latest software releases and technical documentation, ensuring your MII5830‑AB‑16384 operates at peak performance. For international buyers, the distributor can arrange export documentation and provide local language technical assistance.
Buyer FAQ
What measurement resolutions can the MII5830‑AB‑16384 achieve?
The device supports interpolation factors from X4 to X16384, providing linear resolutions from 5 µm down to 1.22 nm and rotary outputs from 20 k to 268 M CPR.
Is the encoder compatible with existing CNC controllers?
Yes. All parameters are programmed in the SmartPrecision II software and saved in the readhead, so the encoder can be matched to the controller’s count rate and signal level without hardware changes.
Can the grating be customized for longer travel?
The metal strip grating (MT series) is made of Inconel 625 and can be cut on‑site up to 30 m, providing a cost‑effective solution for long‑stroke applications.
What environmental protections does the unit have?
The readhead features a large‑area photodiode with multi‑stage optical filtering, making it tolerant to dust and oil. The double‑shielded cable prevents electromagnetic interference over distances up to 10 m.
How is the device calibrated and maintained?
Each unit leaves the factory calibrated with a laser interferometer traceable to NIST standards. In the field, automatic signal‑gain optimization continuously compensates for minor contamination, and a full calibration can be completed in under 30 seconds.
Do you ship worldwide and provide export documentation?
The authorized distributor in Beijing can arrange international shipping, export paperwork, and local language support for overseas buyers.
Supporting media
Before you request a quote
What measurement resolutions can the MII5830‑AB‑16384 achieve?
The device supports interpolation factors from X4 to X16384, providing linear resolutions from 5 µm down to 1.22 nm and rotary outputs from 20 k to 268 M CPR.
Is the encoder compatible with existing CNC controllers?
Yes. All parameters are programmed in the SmartPrecision II software and saved in the readhead, so the encoder can be matched to the controller’s count rate and signal level without hardware changes.
Can the grating be customized for longer travel?
The metal strip grating (MT series) is made of Inconel 625 and can be cut on‑site up to 30 m, providing a cost‑effective solution for long‑stroke applications.
What environmental protections does the unit have?
The readhead features a large‑area photodiode with multi‑stage optical filtering, making it tolerant to dust and oil. The double‑shielded cable prevents electromagnetic interference over distances up to 10 m.
